Micro/Nano Technology Center - Cleanroom
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About
The University of Louisville’s cleanroom is a class 100/1000 $30M 10,000ft^2 facility used for fabrication of novel materials and devices. University of Louisville faculty, other academic institutions and external businesses utilize the cleanroom for sensor, thin film and semiconductor research, while the MNTC also provides micro and nanofabrication services to internal and external researchers.
- Contact Photolithography
- Direct Write Lithography
- Photo Mask Generation
- Sputtering
- Electron Beam Deposition
- Atomic Layer Deposition
- Plasma Enhanced Chemical Vapor Deposition
- Wet Chemical Etching
- Deep Reactive Ion Etching
- Isotropic Etching
- Thermal Annealing
- Oxidation
- Wafer Bonding
- Dicing
- Wire Bonding
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Core Staff/Team
Julia Aebersold, Director of Operations
Curt McKenna, Facilities Manager
Jasmin Beharic, Engineering Senior Researcher
Michael Martin, Engineering Senior Researcher
- JD Morris, Engineering Senior Researcher