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About Us
The Cleanroom is a 10,000 square foot cleanroom facility providing nanofabrication and microfabrication equipment and services for academic and industry researchers.
The Cleanroom is a core component of the Micro/Nano Technology Center (MNTC).
Serving
- UofL Researchers
- External-Academic
- External-Industry
Services and Instruments
| MNTC Instrument List | |
|---|---|
| ABM Aligner | Molecular Vapor Deposition |
| Acid Wet Bench | Oxford PECVD |
| Anneal Furnace | Oxidation/Trash Furnace |
| Ball Bonder | Parylene System |
| Beneq Atomic Layer Deposition | Photoresist Spinner |
| Blue M oven | PDMS Spinner |
| Critical Point Dryer | Rapid Thermal Annealing |
| Dektak Profilometer | Rapid Thermal Processing |
| Diffusion Furnace | RCA Clean Bench |
| Disco Dicing Saw* | Suss Mask Aligner |
| DRIE - Oxford | Suss Wafer Bonder |
| Filmetrics | Technics Sputterer |
| Flip Chip Bonder | Toho Stress Measurement |
| Heidelberg 66DWLFS - Low Resolution Mask writing | Trion Metal Etcher |
| Heidelberg 66DWLFS - Specialty Mask Writing | Ultrasonic Bath |
| HF Vapor Etch | Vase Ellipsometer |
| HF-8 Asher | Wedge Bonder |
| High Speed Camera | Xactix |
| KOH/TMAH Wet Bench | YES Image Reversal Oven |
| Lesker E-beam Evaporator | YES Polyimide Oven |
| Lesker PVD 75 | Zeiss Optical Microscope |
| March RIE | Zygo Optical Interferometer |
Core Acknowledgement
Researchers are strongly encouraged to acknowledge the use of this core facility in publications and presentations. Doing so documents the role of shared infrastructure in advancing UofL research and supports the core’s continued operation and growth.
Consider using the suggested language below when making acknowledgements in your work:
This [publication, project, or research] was made possible, in part, by the Micro/Nano Technology Center Cleanroom [RRID:SCR_025359] at the University of Louisville.
Core Personnel
